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    STUDIA PHYSICA - Issue no. 1 / 2007  
         
  Article:   MEMS: AN OVERVIEW.

Authors:  NORA M. DEMPSEY.
 
       
         
  Abstract:  Micro-Electro-Mechanical-Systems (MEMS) are machines which range in size from a micrometre to a millimetre (Figure 1). They may function as actuators, motors, generators, switches, sensors…. and have applications in fields as diverse as telecommunications, automotive and aerospace, astronomy and ophthalmometry, biotechnology, logistics…  
         
     
         
         
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