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    STUDIA PHYSICA - Issue no. 1 / 2002  
         
  Article:   DETERMINATION OF ELECTRICAL PARAMETERS OF CCP AT ATMOSPHERIC PRESSURE.

Authors:  SORIN DAN ANGHEL.
 
       
         
  Abstract:  In this work a method of determination of electrical parameters of an air rf capacitively coupled plasma at atmospheric pressure is presented. The method is based on the direct measurement of oscillation frequency of rf oscillator and on the simulation of the behaviour of the equivalent circuit using a computer program. The results are in accordance with those obtained by other authors.  
         
     
         
         
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