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In this paper, we report the results concerning characterization of the nanocrystalline diamond with different crystallite structures with the purpose of determining the parameters responsible for the texture, crystallinity, and surface morphology. Beyond the influence of the substrate on these characteristics, the role of the etching gas on diamond growth is studied. It is shown that the grain size is a strong function of the substrate’s material. Crystalline grain size is estimated by broadening the X-ray diffraction peaks using the Scherer equation. Other techniques for structural and morphological characterization used in this study are Raman spectroscopy and scanning electron microscopy and Fourier Transform Infrared spectroscopy.

Keywords: Etching gas, crystallinity, NCD.