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    STUDIA CHEMIA - Issue no. 2 / 2011  
         
  Article:   PRECUSOR CHEMISTRY FOR THE ACETYLACETONATE-BASED CHEMICAL SOLUTION DEPOSITION OF EPITAXIAL CERIA THIN FILMS.

Authors:  .
 
       
         
  Abstract:  Cerium acetylacetonate (beta-diketonate) Ce(C5H7O2)3xH2O has been used in the preparation of the precursor solution for the deposition of epitaxial ceria thin films. Propionic acid easily dissolves the cerium acetylacetonate resulting in a stable coating solution. The precursor chemistry of the as-prepared coating solution, resulted powder and thin films has been investigated by infrared spectroscopy, mass spectrometry coupled with thermal analysis and X-ray diffraction. The analysis suggests the complex nature of the coating solution due to the formation of a cerium acetylacetonate-propionate mixed ligand complex. The CeO2 thin films deposited by spin coating on single crystalline (100)MgO substrates starting from this solution exhibit a high degree of epitaxy with a [h00]||[h00] epitaxial relationship between the substrate and the film.

Keywords: cerium acetylacetonate, chemical solution deposition (CSD), ceria epitaxial thin films, DTA-TG-MS 

 
         
     
         
         
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