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The influence of thickness upon the magnetic and structural properties of Sm-Co films was studied. The films were deposited at room temperature by dc magnetron sputtering and annealed to achieve the SmCo phase formation. The highest value of the coercivity was 0.4 kOe, obtained for the 20 nm sputtered Sm-Co thin film sputtered from a SmCo5 target after post-deposition annealing. Thickness growth of the sputtered Sm-Co layers did not have beneficial influence upon the coercive field of the samples. However the saturation magnetization of the samples increased with the thickness of the Sm-Co as well as with the annealing.

Keywords: Thin films, Sputtering, Microstructure, Sm-Co, Underlayer