Rezumat articol ediţie STUDIA UNIVERSITATIS BABEŞ-BOLYAI

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Diamond–like carbon (DLC), a form of amorphous carbon (a-C) or hydrogenated amorphous carbon (a-C: H) has been actively studied due to its interesting properties in many fields of industry. In this work, Diamond-like carbon films were deposited on silicon, glass and quartz substrates via DC plasma enhanced chemical vapor deposition (DC-PECVD) system at the substrate temperature of 180°C from gaseous mixtures of C₂H₂/H₂. The deposited films were characterized by Atomic Force Microscopy (AFM), Fourier Transform Infrared (FTIR) and Raman spectroscopy. FTIR measurements depict the C-H and C-C vibration mode assignments in DLC structures in all of the samples. The Raman spectra confirm the formation of DLC structures due to the existence of the D and G peaks. The surface morphology of the grown films was investigated by AFM analysis.

Keywords: DLC, FTIR, Plasma Enhanced CVD.